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Semiconductor Industry Services

Advanced Fabs, Subfabs, and R&D Facilities
Industries / Semiconductor Industry Services
In semiconductor manufacturing, precision isn’t a goal—it’s a requirement.

Tillson Industrial provides cleanroom-compliant mechanical services for tool installs, subfab support, and utility tie-ins in high-tech fabs across the U.S.

Whether you’re standing up a new line, upgrading toolsets, or maintaining utility systems, we deploy millwrights trained for micro-tolerances, contamination control, and schedule-sensitive work.

Precision Millwright Services for High-Tech Manufacturing

silicon wafer,  semiconductor manufacturing

We understand the operational rigor of advanced fabs. Our crews work in compliance with ISO cleanroom standards and follow documented protocols for vibration isolation, non-contaminating materials, and tightly controlled rigging and torque sequences.

We support the mechanical side of:

  • CMP, lithography, etch, metrology, and deposition tools
  • Utility skids (vacuum, exhaust, chiller, DI water, CDA, N₂, process gases)
  • Subfab support systems and risers
  • Equipment moves, replacements, and upgrades
  • Skid-to-skid alignments and mechanical tie-ins

What We Do for Semiconductor Clients

1. Cleanroom Equipment Installation
We set process tools and fab equipment with laser-level accuracy. We install vibration isolation mounts, shim and level baseplates, and torque to OEM spec.

2. Subfab Rigging & Placement
Our teams install and align utility skids, vacuum pumps, scrubbers, exhaust systems, and gas cabinets—below clean zones and under airflow protection.

3. Mechanical Utility Tie-Ins
We connect equipment to mechanical lines—DI water, CDA, chilled water, exhaust, and drain—using vibration-damped fittings, torque-certified hardware, and flex supports.

4. Grouting & Base Prep
We install Chockfast epoxy grout under heavy subfab equipment, verify anchor torque, and prep foundations for long-term alignment and vibration isolation.

5. Laser Alignment & System Validation
We laser-align shafts, verify DBSE, and correct soft foot or anchor misalignment. We provide full documentation for QA, commissioning, or requalification teams.

6. Precision Equipment Moves
Tool relocations are high-risk. We rig, transport, re-set, and align fab tools without disrupting adjacent lines, airflow, or clean zones.

Why Fab Operators Choose Tillson

Because every spec, surface, and second matters.
Tillson operates like a surgical unit inside your fab—trained, tool-qualified, and documentation-driven. We’ve helped bring fabs online ahead of schedule, corrected catastrophic misalignments before startup, and executed utility tie-ins without a single particle out of place.

Our Cleanroom Commitments:

  • ISO cleanroom apparel compliance
  • Non-contaminating rigging gear
  • Zero-particle protocols
  • Final alignment and torque reporting
  • Coordination with tool OEMs and facility teams
  • Equipment ID and layout verification

Where We Work

  • 300mm and 200mm semiconductor fabs
  • Advanced logic and memory manufacturing plants
  • Foundry expansion sites
  • R&D and pilot fabs
  • Equipment upgrade and decommissioning projects
  • Utility corridors and subfab zones

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